✦ LIBER ✦
Application of the polysilicon edge sealed LOCOS process in scaled VLSI circuit fabrication : D. Simeonov, T. Balabanska, E. Goranova, M. Zvetkova, T. Dimitrova and Z. Naidenova. Microelect. J. 19(5), 11 (1988)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 140 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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