Technologies for the fabrication of cyli
โ
G. Lullo; C. Arnone; C.G. Giaconia
๐
Article
๐
1997
๐
Elsevier Science
๐
English
โ 308 KB
A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 ~tm range.