✦ LIBER ✦

Technologies for the fabrication of cylindrical fine line devices

✍ Scribed by G. Lullo; C. Arnone; C.G. Giaconia

Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 308 KB
Volume: 35
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(96)00118-9

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✦ Synopsis

A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 ~tm range.

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