Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA

✍ Scribed by Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi

• Book ID: 120914821
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 694 KB
• Volume: 19
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-012-1472-6