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Application of iterative deconvolution procedures for evaluation of boron depth profiles

✍ Scribed by J. Červená; V. Hnatowicz; J. Kvítek; V. Rybka; P. Krejčí

Book ID
112571612
Publisher
Springer
Year
1985
Tongue
English
Weight
377 KB
Volume
35
Category
Article
ISSN
0011-4626

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📜 SIMILAR VOLUMES

Effectiveness and Limits of the Deconvol
Effectiveness and Limits of the Deconvolution of SIMS Depth Profiles of Boron in Silicon
✍ Gautier, B.; Dupuy, J. C.; Prost, R.; Prudon, G. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 533 KB

In this paper, an iterative algorithm is used in order to deconvolve some real and simulated SIMS proÐles of boron-doped layers in silicon. The real SIMS proÐles are obtained by the analysis of delta layers of boron-doped silicon in a silicon matrix, analysed in a Cameca IMS3/4f instrument at obliq