Application of high-κ gate dielectrics and metal gate electrodes to enable silicon and non-silicon logic nanotechnology

✍ Scribed by Robert Chau; Justin Brask; Suman Datta; Gilbert Dewey; Mark Doczy; Brian Doyle; Jack Kavalieros; Ben Jin; Matthew Metz; Amlan Majumdar; Marko Radosavljevic

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 327 KB
• Volume: 80
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.04.035