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Application of Fresnel diffraction from a phase step to the measurement of film thickness

โœ Scribed by Taghi Tavassoly, Mohammad ;Moaddel Haghighi, Iman ;Hassani, Khosrow


Book ID
115354642
Publisher
The Optical Society
Year
2009
Tongue
English
Weight
517 KB
Volume
48
Category
Article
ISSN
1559-128X

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