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Application of electroplating in MEMS-micromachining exemplified by a microrelay

✍ Scribed by M. Becker; D. Lütke Notarp; J. Vogel; E. Kieselstein; J.-P. Sommer; K. Brämer; V. Großer; W. Benecke; B. Michel

Book ID: 106186236
Publisher: Springer-Verlag
Year: 2001
Tongue: English
Weight: 282 KB
Volume: 7
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s005420000086

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