✦ LIBER ✦
Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices
✍ Scribed by Singh, R A; Satyanarayana, N; Kustandi, T S; Sinha, S K
- Book ID
- 120574717
- Publisher
- Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 1006 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0022-3727
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