Application of electron beams in thermal processing of semiconductor materials and devices: R.A. McMahon, H. Ahmed, D.J. Godfrey and M.G. Pitt Microelectron. J. 15(2), 5 (1984)

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 92 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(85)80052-5

✦ Synopsis

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