Application of electron beams in thermal processing of semiconductor materials and devices : R. A. McMahon, H. Ahmed, D. J. Godfrey and M. G. Pitt. Microelectron. J. 15 (2), 5 (1984)

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 129 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)91029-1