An overview of supercritical CO2 applica
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Gina L Weibel; Christopher K Ober
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Article
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2003
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Elsevier Science
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English
β 215 KB
Supercritical CO technologies have only recently been proposed for microelectronic applications in response 2 to needs for material-compatible cleaning systems, small-dimension developing solvents, and low chemical-use processes. Numerous proposed CO applications that are both process enabling and p