Applicability limits of the two-frequency capacitance measurement technique for the thickness extraction of ultrathin gate oxide

✍ Scribed by Nara, A.; Yasuda, N.; Satake, H.; Toriumi, A.

• Book ID: 120256720
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 247 KB
• Volume: 15
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/66.999594