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Apparatus for the synchronous recording of the electrical and optical parameters of the process of obtaining oxide films on metals

✍ Scribed by I. P. Tat’yanin; V. V. Chernyshev; L. N. Korablin

Book ID
110544506
Publisher
Springer US
Year
1998
Tongue
English
Weight
192 KB
Volume
41
Category
Article
ISSN
0543-1972

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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower