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Apparatus for depositing coatings in vacuo: F V Ur'yash and S N Vladimirov, Soviet Patent, class C 23 c, 13/12, No 396450, claimed 3 May 1971, publd 17 January 1974 (in Russian)

Publisher: Elsevier Science
Year: 1975
Tongue: English
Weight: 176 KB
Volume: 25
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(75)90795-2

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