1276. Device for the transportation of a substrate in a vacuum apparatus: G V Lagutkin and M M Shubert,Soviet Patent, class C 23 c, 13/08 No. 390200, claimed 8 February 1971, publd 3 December 1973 (in Russian).

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 155 KB
• Volume: 25
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(75)90543-6