Anomalous low temperature mechanical properties of single-crystal silicon

✍ Scribed by R.E. Mihailovich; J.M. Parpia

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 188 KB
• Volume: 165-166
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/s0921-4526(90)80912-3

✦ Synopsis

We have measured the low temperature mechanical properties of a high Q oscillator fabricated from single crystal silicon. Operated at strains of 10m7, the oscillator exhibits unusual behavior in both the dissipation and resonant frequency. In addition, we have performed systematic frequency sweeps through resonance at varying strain amplitudes. We observe the dramatic onset of non-linear behavior at temperatures below a few hundred millikelvin.