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Anodic oxidation of porous silicon bilayers

✍ Scribed by R Guerrero-Lemus; F.A Ben-Hander; J.D Moreno; R.J Martı́n-Palma; J.M Martı́nez-Duart; P Gómez-Garrido; M.L Marcos; J González-Velasco


Book ID
108344803
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
101 KB
Volume
80
Category
Article
ISSN
0022-2313

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Electrochemistry of Silicon || Anodic Ox
✍ Lehmann, Volker 📂 Article 📅 2002 🏛 Wiley-VCH Verlag GmbH ⚖ 358 KB 👁 2 views

## Silicon Oxidation Techniques One of the properties that makes silicon the elephant in the zoo of semiconducting materials used in microelectronic manufacturing is the superior dielectric properties of its oxide [So1]. An SiO 2 layer can be formed by a simple thermal oxidation process in a wet (