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Anodic aluminum oxide template assisted growth of vertically aligned carbon nanotube arrays by ECR-CVD

✍ Scribed by Chen, Po-Lin; Chang, Jun-Kai; Kuo, Cheng-Tzu; Pan, Fu-Ming


Book ID
123138975
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
324 KB
Volume
13
Category
Article
ISSN
0925-9635

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## Abstract Carbon nanotube (CNT) arrays with different packing density were synthesized by inductively coupled plasma (ICP‐)CVD using anodic alumina oxide (AAO) on Si as a nanotemplate. Pre‐electrodeposited Ni nanowires and CH~4~ were used as catalyst and reaction gas, respectively. The parameters