Annealing temperature effect on the performance of nonvolatile HfO[sub 2] Si-oxide-nitride-oxide-silicon-type flash memory

✍ Scribed by Lin, Yu-Hsien; Chien, Chao-Hsin; Chang, Chun-Yen; Lei, Tan-Fu

• Book ID: 121228720
• Publisher: AVS (American Vacuum Society)
• Year: 2006
• Tongue: English
• Weight: 907 KB
• Volume: 24
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.2174021