𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Annealing of aluminum-silicon-dioxide-silicon structures afterα-particle bombardment

✍ Scribed by S. V. Vasin; V. B. Tulvinskii; É. T. Shipatov


Book ID
110124071
Publisher
SP MAIK Nauka/Interperiodica
Year
1999
Tongue
English
Weight
30 KB
Volume
25
Category
Article
ISSN
1063-7850

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Structure and optical properties of HfO2
✍ Tingting Tan; Zhengtang Liu; Hongcheng Lu; Wenting Liu; Hao Tian 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 231 KB

HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and