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Annealing-Induced Changes in Electrical Characteristics of Al/Al-Rich Diodes

โœ Scribed by Zhen Liu; Chen, T.P.; Yang Liu; Zhan Hong Cen; Shu Zhu; Ming Yang; Jen It Wong; Yi Bin Li; Sam Zhang

Book ID
114620269
Publisher
IEEE
Year
2011
Tongue
English
Weight
801 KB
Volume
58
Category
Article
ISSN
0018-9383

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The electrical characteristics of the Al/Silicon Rich Oxide (SRO)/Si device are studied as a function of bulk concentration of N and P type silicon wafers, and dierent contents of excess silicon and thickness of the SRO ยฎlm. It is experimentally observed that depending on the type and impurity conce