Annealing effect on structures and luminescence of amorphous SiN films

✍ Scribed by Jun Xu; Yunjun Rui; Deyuan Chen; Jiaxin Mei; Liping Zhou; Zhanhong Cen; Wei Li; Kunji Chen

• Book ID: 113791089
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 362 KB
• Volume: 61
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2007.03.095