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Annealing Behaviour of GaN after Implantation with Hafnium and Indium

✍ Scribed by K. Lorenz; F. Ruske; R. Vianden

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 129 KB
Volume: 228
Category: Article
ISSN: 0370-1972
DOI: 10.1002/1521-3951(200111)228:1<331::aid-pssb331>3.0.co;2-6

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