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Anisotropy in the Anodic Oxidation of Silicon in KOH Solution

✍ Scribed by Philipsen, Harold G. G.; Kelly, John J.

Book ID
126216641
Publisher
American Chemical Society
Year
2005
Tongue
English
Weight
236 KB
Volume
109
Category
Article
ISSN
0022-3654

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πŸ“œ SIMILAR VOLUMES

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## Abstract In the present study anodic oxidation of iridium layer formed thermally on a gold‐sputtered quartz crystal electrode has been investigated by electrochemical quartz crystal microgravimetry (EQCM) in the solutions of 0.5β€…M H~2~SO~4~ and 0.1β€…M KOH. The emphasis here has been put on the mi