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Anisotropy in the Anodic Oxidation of Silicon in KOH Solution.

✍ Scribed by Harold G. G. Philipsen; John J. Kelly

Publisher: John Wiley and Sons
Year: 2005
Weight: 9 KB
Volume: 36
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200548016

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