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Anisotropy effects on the reliability of single-crystal silicon

✍ Scribed by Oscar Borrero-López; Tania Vodenitcharova; Mark Hoffman

Book ID
113898612
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
421 KB
Volume
63
Category
Article
ISSN
1359-6462

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## Abstract We performed polarized/confocal Raman microprobe measurements in order to visualize the effects of crystallographic orientation and anisotropic volume changes on the elastic stress field developed in single‐crystalline silicon upon impinging its surface with a pyramidal indenter. A theo