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The effects of Cl2 on the oxidation of single crystal silicon carbide

โœ Scribed by Z. Zheng; R.E. Tressler; K.E. Spear


Book ID
115847404
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
896 KB
Volume
33
Category
Article
ISSN
0010-938X

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