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Anisotropy effects in physical sputtering investigated by laser-induced fluorescence spectroscopy

✍ Scribed by Goehlich, A.; Niemöller, N.; Döbele, H. F.


Book ID
118052465
Publisher
The American Physical Society
Year
2000
Tongue
English
Weight
270 KB
Volume
62
Category
Article
ISSN
1098-0121

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