✦ LIBER ✦
Diagnostics of sputtering processes of carbon and carbides by laser-induced fluorescence spectroscopy in the VUV at 166 nm
✍ Scribed by M. Röwekamp; A. Goehlich; H. F. Döbele
- Publisher
- Springer
- Year
- 1992
- Tongue
- English
- Weight
- 731 KB
- Volume
- 54
- Category
- Article
- ISSN
- 1432-0630
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