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Anisotropy and interlayer interaction in Mo/Si multilayers

✍ Scribed by A.S. Sidorenko; N.Ya. Fogel; E.I. Buchstab; R. Tidecks; O.B. Moldovan

Book ID: 114225631
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 95 KB
Volume: 240
Category: Article
ISSN: 0304-8853
DOI: 10.1016/s0304-8853(02)00013-6

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