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Anisotropic Warpage of Wafers with Anodized Porous Silicon Layers

✍ Scribed by Ayvazyan, G. E.

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 96 KB
Volume: 175
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(199910)175:2<r7::aid-pssa99997>3.0.co;2-2

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