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Anisotropic etching of Si (100) studied by scanning electron microscopy

✍ Scribed by Ivan Stoev

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 285 KB
Volume: 51
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(95)01015-s

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