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Anisotropic etching characteristics of platinum electrode for ferroelectric capacitor

✍ Scribed by Jin Hong Kim; Seong Ihl Woo; Byung Yun Nam; Won Jong Yoo

Book ID: 114537717
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 672 KB
Volume: 46
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.760407

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