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Angular distributions of sputtered particles from lithium-implanted aluminium and copper crystals

โœ Scribed by A. Johansen; E. Johnson; L. Sarholt-Kristensen; S. Steenstrup; H.H. Andersen; V.M. Buhanov; V.S. Chernysh; I.N. Ivanov; K.F. Minnebaev

Book ID
113281805
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
637 KB
Volume
61
Category
Article
ISSN
0168-583X

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture