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Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

✍ Scribed by Schröder, Sven ;Herffurth, Tobias ;Trost, Marcus ;Duparré, Angela


Book ID
115355009
Publisher
The Optical Society
Year
2010
Tongue
English
Weight
718 KB
Volume
49
Category
Article
ISSN
1559-128X

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