Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light

✍ Scribed by Aquila, A.; Salmassi, F.; Liu, Yanwei; Gullikson, E.M.

• Book ID: 115412314
• Publisher: Optical Society of America
• Year: 2009
• Tongue: English
• Weight: 180 KB
• Volume: 17
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.17.022102