Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates

✍ Scribed by Mohite, S S; Kesari, Haneesh; Sonti, V R; Pratap, Rudra

• Book ID: 120819814
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 316 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/11/013