Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

✍ Scribed by Ashok Kumar Pandey; Rudra Pratap; Fook Siong Chau

• Book ID: 108262817
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 769 KB
• Volume: 135
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2006.09.006