Analytical solutions for high-dose shallow arsenic profiles in silicon

✍ Scribed by M. Ghezzo; G. Gildenblat

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 232 KB
• Volume: 28
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(85)90083-8