Analytical solutions for high-dose shallow arsenic profiles in silicon : M. Ghezzo and G. Gildenblat. Solid-St. Electron.28 (9) 909 (1985)

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 123 KB
• Volume: 26
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(86)90181-2