Analytical Modeling of the Interaction of Vacancies and Oxygen for Oxide Precipitation in RTA Treated Silicon Wafers

✍ Scribed by Kissinger, G.; Dabrowski, J.; Sattler, A.; Seuring, C.; Müller, T.; Richter, H.; von Ammon, W.

• Book ID: 118261270
• Publisher: The Electrochemical Society
• Year: 2007
• Tongue: English
• Weight: 410 KB
• Volume: 154
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2717492