✦ LIBER ✦
Analytical relationship for the oxidation of silicon in dry oxygen in the thin-film regime: Hisham Z Massoud and James D Plummer, J appl Phys, 62, 1987, 3416–3423
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 139 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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