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Analytical modeling of electrostatic membrane actuator for micro pumps

✍ Scribed by Saif, M.T.A.; Alaca, B.E.; Sehitoglu, H.

Book ID: 121694621
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 294 KB
Volume: 8
Category: Article
ISSN: 1057-7157
DOI: 10.1109/84.788638

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