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Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

✍ Scribed by A. Arun; D. Acquaviva; M. Fernández-Bolaños; P. Salet; H. Le-Poche; P. Pantigny; T. Idda; A.M. Ionescu

Book ID: 104052476
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 514 KB
Volume: 87
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.10.021

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