Analytical Model for Two-Dimensional Ion Implantation Profile in MOS-Structure Substrate

✍ Scribed by Suzuki, K.; Tanabe, R.; Kojima, S.

• Book ID: 114619814
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 407 KB
• Volume: 56
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2009.2032621