Two-Dimensional Fluid Model of Pulse Sheath in Plasma Immersion Ion Implantation With Dielectric Substrates

✍ Scribed by Li, Xue-Chun; Wang, You-Nian

• Book ID: 120166799
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 284 KB
• Volume: 35
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/TPS.2007.903880