Analysis of the optimal dimension on the electrothermal microactuator
โ Scribed by Chen, R S; Kung, C; Lee, Gwo-Bin
- Book ID
- 121227894
- Publisher
- Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 147 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0960-1317
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