A nodal analysis model for the out-of-plane beamshape electrothermal microactuator

✍ Scribed by Rengang Li; Qing-An Huang; Weihua Li

• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 413 KB
• Volume: 15
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-008-0662-8