𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Analysis of the negative ion characteristics of O2 supermagnetron plasma for submicron etching use

✍ Scribed by Haruhisa Kinoshita; Masahiro Honda; Toshiaki Tatsuta; Fumio Sakiya


Book ID
108390541
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
297 KB
Volume
55
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES